R&D
R&D / Quality Management
R&D
HOME > R&D / Quality Management > R&D
"CMTX Research Institute"is at the center of CMTX
which leads the Semiconductor and Display equipment Industries and continues to
advance its capabilities in developing core materials and components.
Fields of research
-
01
SAPPHIRE PARTS
Sapphire Etch Ring / Focus Ring / Top Ring etc.
Advanced flawless Sapphire Bonding Technology.
Unique Sapphire Tube production technology.
Localized Technology for Sapphire Dome.
-
02
CERAMIC PARTS
Manufacture of high strength Porous Ceramic with high porosity.
Manufacturing vacuum chuck capable of uniform adsorption without generating particles.
Manufacturing Technology of AlN(Aluminum Nitride) with Y2O3(Yttrium Oxide) Removed.
-
03
DIAMOND PARTS
Diamond Polishing Technology.
Diamond Flattening Technology.
-
04
SILICON PARTS
Silicon Cleaning Technology.
Silicon Optical Polishing Technology.
Silicon Lapping Technology.
Silicon Acid Etching Technology.
